【中文】采用亚沸蒸馏、气体吸收、吸附分离、离子膜分离、液膜分离等先进技术提纯；运用四极杆 ICP-MS / ICP-MSMS（可检测控制 70 余种金属元素）及进口颗粒计数仪，严格控制颗粒数量与金属杂质，达到 SEMI G4、G5 级国际先进水平。
【English】Produced and purified using sub-boiling distillation, gas absorption, adsorption separation, ion membrane and liquid membrane separation. Quadrupole ICP-MS/ICP-MSMS (over 70 metallic elements) and imported particle counters control particle numbers and metal impurities to reach SEMI G4/G5 international levels.
